Another milestone for wafer based Solmates-PLD: a record low 0.3% 1 sigma thickness uniformity.
Measured with a 49pts map on a 200mm wafer at CEA-Leti. This is essential for MEMS manufacturers in general. For BAW resonators, thickness equates to resonance frequency, and non-uniformity means cumbersome trimming steps.
We claimed our new PLD platform would enable significantly better WiWu, and now we deliver upon promise. Sub-optimized and already on par with established PVD capabilities.