An increasing number of silicon integrated devices are based on integration of photonic principles with other on-chip functionalities. The flexibility in material processing makes PLD a very suitable technology for integration of complex thin films onto different kinds of challenging interfaces for photonics.
Solmates has been a partner in several successful projects on integration of MEMS thin films with the unique TriPleX chips from Lionix International BV. In such photonic systems the strain applied by a Solmates piezoelectric PZT layer influences the light propagation through an embedded waveguide. Control over particles on the surface is crucial for photonic devices, making Solmates PLD a key technology in the integration of these functionalities.
Modulation of the optical waves enables the fabrication of photonic chips for different applications like beam steering, optical switches and tuneable lasers. The capability of integration of PZT layers with embedded waveguide structures is expected to bring even more functionalities in the coming years.
“The flexibility in material processing makes PLD a very suitable technology for integration of complex thin films onto different kinds of challenging interfaces for photonics.”
Hetero-epitaxy for Photonics
Due to the easy nucleation of species in PLD deposited thin films, Solmates’ wafer based PLD technology is very suitable for upscaling of different epitaxial processes. Deposition by PLD on top of epitaxial interfaces can lead to adaptation of the crystal structure from the substrate by the film, enabling stacking of different epitaxial matererials on substrates up to 300 mm. The picture on the right demonstrates an epitaxial layer stack on silicon, deposited in 1 PLD-run without vacuum break.
A different approach to epitaxy is the integration of PLD with other deposition technologies, achieved by integration of Solmates PLD to a clusterframe. High quality seed layers could be complimented by PLD enabling vast growth of full epitaxial stacks of different materials. Solmates has demonstrated this principle by combining PLD technology with wafer based MBE processes from another supplier.
Photonics processes by Solmates PLD: