Silicon Austria Labs (SAL) presented at the international MEMS2021 conference a DUAL-AXIS RESONANT SCANNING MEMS MIRROR WITH PULSED-LASER-DEPOSITED BARIUM-DOPED PZT [1] demonstrating high potential of using pulsed laser deposition for PZT MEMS with Solmates PLD platform. Piezo micromirrors pave the path for highly miniaturized pico-projectors and future integration into autonomous vehicles enabling Dynamic Light Projection for Road Lighting.
[1] A. Piot, J. Pribošek, M. Moridi, “Dual-axis resonant scanning MEMS mirror with pulsed-laser-deposited barium-doped PZT”, in 2021 IEEE 34th International Conference on Micro Electro Mechanical Systems (MEMS), Jan. 2021.
(The picture is used with curtacy of SAL)
