Solmates is involved in numerous national and international research projects where PLD is employed for various purposes by institutes, (SME) development partners and industrial end-users.
The ID2PPAC project involves around different research activities concerning the future 2nm technology node. To continue the Moore’s law trajectory to the 2nm node, while meeting PPAC requirements, the combination of further advancements in EUV lithography & masks, 3D device structures, materials and metrology is required. The strength of the project pivots on the focused engagement of leading expert partners in these key interlocking areas and a shared pilot line.
Within this consortium Solmates is responsible for the development and installation of a 300 mm PLD system at Imec. The system will be used for semi-damascene material development.
The ID2PPAC project is funded by the EXCEL Joint Undertaking program under grant agreement No 101007254.