Publications

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Microwave Characterization of Ba-Substituted PZT and ZnO Thin Films

Category: External, MEMS, PLD, PZT
March 24, 2018

Davide Tierno, Matthijn Dekkers, Paul Wittendorp, Xiao Sun, Samuel C. Bayer, Seth T. King, Sven Van Elshocht, Marc Heyns, Iuliana P. Radu, and Christoph Adelmann IEEE Trans Ultrason Ferroelectr Freq Control. 2018 May;65(5):881-888

Controlling Piezoelectric Responses in Pb(Zr_0.52Ti_0.48)O₃ Films through Deposition Conditions and Nanosheet Buffer Layers on Glass

Category: Internal, MEMS, PLD, PZT
March 24, 2017

Minh D.Nguyen, Evert P. Houwman, Huiyu Yuan, Benjamin Wylie- Van Eerd, Matthijn Dekkers, Gertjan Koster, Johan E. Ten Elshof, Guus Rijnders ACS applied materials & interfaces, 9(41), 35947-35957 (2017)

Lead-free (K_0.5Na_0.5)NbO₃ thin films by pulsed laser deposition driving MEMS-based piezoelectric cantilevers

Category: Internal, MEMS, PLD
April 6, 2016

Minh D. Nguyen, Matthijn Dekkers, Evert P. Houwman, Hien T. Vuc, Hung N. Vuc, Guus Rijnders Materials Letters, 164 (2016), Pages 413–416.

Enhanced energy storage density and energy efficiency of epitaxial PLZT (Pb_0.9La_0.1(Zr_0.52Ti_0.48)O₃) relaxor-ferroelectric thin-films deposited on silicon by pulsed laser deposition

Category: Internal, MEMS, PLD
March 25, 2016

Minh D.Nguyen, Chi T. Q.Nguyen, Evert P.Houwman, Hung N.Vu, Matthijn Dekkers and Guus Rijnders APL MATERIALS 4, 080701 (2016)

Highly Oriented Growth of Piezoelectric Thin Films on Silicon Using Two-Dimensional Nanosheets as Growth Template Layer

Category: Internal, MEMS, PLD
March 25, 2016

Minh D. Nguyen,Huiyu Yuan, Evert P. Houwman, Matthijn Dekkers, Gertjan Koster, Johan E. ten Elshof, and Guus Rijnders ACS Appl. Mater. Interfaces, Article ASAP, Publication Date (Web): October 26, 2016 (2016)

Stress-optic modulator in TriPleX platform using a Piezoelectric lead zirconate titanate (PZT) thin film

Category: External, MEMS, Photonics, PZT
April 6, 2015

Naser Hosseini, Ronald Dekker, Marcel Hoekman, Matthijn Dekkers, Jan Bos, Arne Leinse, and Rene Heideman Optics Express, Vol. 23, Issue 11, (2015) pp. 14018-14026

Analysis of thin-film PZT/LNO stacks on an encapsulated TiN electrode

Category: External, MEMS, PLD, PZT
April 6, 2014

B. Kaleli, M.D. Nguyen, J. Schmitz, R.A.M. Wolters, R.J.E. Hueting Microelectronic Engineering 119 (2014) 16–19

Enhanced piezoelectric properties of (110)-oriented PbZr_1−xTi_xO₃ epitaxial thin films on silicon substrates at shifted morphotropic phase boundary

Category: Internal, MEMS, PLD, PZT
April 6, 2014

Wan, X. and Houwman, E.P. and Steenwelle, R.J.A. and Schaijk, R. van and Nguyen, M.D. and Dekkers, J.M. and Rijnders, A.J.H.M. Appl. Phys. Lett, 104. (2014) 092902

A Fast Room-Temperature Poling Process of Piezoelectric Pb(Zr_0.45Ti_0.55)O₃ Thin Films

Category: Internal, MEMS, PLD, PZT
April 6, 2014

Minh Duc Nguyen, Evert Houwman, Matthijn Dekkers, Hung Ngoc Vu, and Guus Rijnders Sci. Adv. Mater., Vol. 6, No. 2 (2014), 1947-2935

Epitaxial Pb(Mg_1/3Nb_2/3)O₃-PbTiO₃ (67/33) thin films with large tunable self-bias field controlled by a PbZr1xTixO3 interfacial layer

Category: Internal, MEMS, PLD
April 6, 2014

M. Boota, E. P. Houwman, M. Dekkers, M. Nguyen, and G. Rijnders Appl. Phys. Lett., 104, (2014) 182909

Pulsed laser deposition in Twente: from research tool towards industrial deposition

Category: Internal, PLD
April 6, 2014

Dave H.A. Blank, Matthijn Dekkers and Guus Rijnders J. Phys. D: Appl. Phys. 47 (2014) 034006

Integration of a Piezoelectric Layer on Si FinFETs for Tunable Strained Device Applications

Category: External, MEMS, PLD
April 6, 2014

Buket Kaleli, Raymond J. E. Hueting, Minh D. Nguyen, and Rob A. M. Wolters IEEE TRANSACTIONS ON ELECTRON DEVICES, VOL. 61, NO. 6, (2014)

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