Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation

Yagubizade, H. , Darvishi, M. , Chen, Y.Y. ,  Nguyen, M.D. , Dekkers, J.M. , Wiegerink, R.J. , Elwenspoek, M.C. and  Tas, N.R.
Appl. Phys. Lett, 102 (6). (2013) 063509

A length extensional mode lead zirconate titanate (PZT)-on-Si resonator is presented using 50 Ohm termination with high-stopband rejection exploiting feed-through cancellation. A 250 nm-thick (100)-dominant oriented PZT thin-lm deposited on top of 3 μm Si using pulsed laser deposition (PLD) has been employed. The resonator is presented with the length of 40 μm (half-wavelength), which corresponds to a resonance frequency of about 83 MHz. The effect of feed-through cancellation has been studied to obtain high-stopband rejection using bottom electrode patterning in the presence of a specific grounding resistance. Using this technique, the stopband rejection can be improved by more than 20 dB.ms.

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